Arne Schleunitz
About
Arne Schleunitz has authored 21 papers that have received a total of 360 indexed citations.
This includes 19 papers in Biomedical Engineering, 17 papers in Electrical and Electronic Engineering and 4 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Nanofabrication and Lithography Techniques (18 papers), Advancements in Photolithography Techniques (14 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (8 papers). Arne Schleunitz is often cited by papers focused on Nanofabrication and Lithography Techniques (18 papers), Advancements in Photolithography Techniques (14 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (8 papers) and collaborates with scholars based in Switzerland, Germany and Austria. Arne Schleunitz's co-authors include Helmut Schift, Gabi Grützner, Anna Klukowska, Robert Kirchner and Dieter Nees and has published in prestigious journals such as Optics Express, Lab on a Chip and Nanomaterials
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