F. J. Pantenburg
About
F. J. Pantenburg has authored 28 papers that have received a total of 345 indexed citations.
This includes 22 papers in Electrical and Electronic Engineering, 13 papers in Biomedical Engineering and 9 papers in Radiation. The topics of these papers are Advancements in Photolithography Techniques (17 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (11 papers) and Advanced X-ray Imaging Techniques (7 papers). F. J. Pantenburg is often cited by papers focused on Advancements in Photolithography Techniques (17 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (11 papers) and Advanced X-ray Imaging Techniques (7 papers) and collaborates with scholars based in Germany, France and Russia. F. J. Pantenburg's co-authors include J. Mohr, Sven Achenbach, J. J. Mohr, Werner Karl Schomburg and H. Hein and has published in prestigious journals such as Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms and Microelectronic Engineering
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