Sven Achenbach
About
Sven Achenbach has authored 60 papers that have received a total of 518 indexed citations.
This includes 47 papers in Electrical and Electronic Engineering, 38 papers in Biomedical Engineering and 10 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Advancements in Photolithography Techniques (19 papers), Advanced MEMS and NEMS Technologies (11 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (10 papers). Sven Achenbach is often cited by papers focused on Advancements in Photolithography Techniques (19 papers), Advanced MEMS and NEMS Technologies (11 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (10 papers) and collaborates with scholars based in Canada, Germany and China. Sven Achenbach's co-authors include J. Mohr, David M. Klymyshyn, Garth Wells, F. J. Pantenburg and Michael Jacobs and has published in prestigious journals such as Analytical Chemistry, Sensors and Review of Scientific Instruments
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