Hiroaki Kawata
About
Hiroaki Kawata has authored 149 papers that have received a total of 1.0k indexed citations.
This includes 112 papers in Electrical and Electronic Engineering, 94 papers in Biomedical Engineering and 35 papers in Surfaces, Coatings and Films. The topics of these papers are Nanofabrication and Lithography Techniques (88 papers), Advancements in Photolithography Techniques (81 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (35 papers). Hiroaki Kawata is often cited by papers focused on Nanofabrication and Lithography Techniques (88 papers), Advancements in Photolithography Techniques (81 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (35 papers) and collaborates with scholars based in Japan, Ireland and United States. Hiroaki Kawata's co-authors include Yoshihiko Hirai, Masaaki Yasuda, Kenji Murata, Kazuhiro Tada and Masamitsu Shirai and has published in prestigious journals such as Journal of Applied Physics, Journal of The Electrochemical Society and Lab on a Chip
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