Yoshihiko Hirai
About
Yoshihiko Hirai has authored 217 papers that have received a total of 2.4k indexed citations.
This includes 175 papers in Biomedical Engineering, 164 papers in Electrical and Electronic Engineering and 55 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Nanofabrication and Lithography Techniques (157 papers), Advancements in Photolithography Techniques (134 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (55 papers). Yoshihiko Hirai is often cited by papers focused on Nanofabrication and Lithography Techniques (157 papers), Advancements in Photolithography Techniques (134 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (55 papers) and collaborates with scholars based in Japan, Germany and Ireland. Yoshihiko Hirai's co-authors include Hiroaki Kawata, Masaaki Yasuda, Yoshio Tanaka, Hisao Kikuta and Masaki Nakajima and has published in prestigious journals such as Applied Physics Letters, Journal of Applied Physics and Physical Review B
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