Mark D. Smith
About
Mark D. Smith has authored 66 papers that have received a total of 434 indexed citations.
This includes 63 papers in Electrical and Electronic Engineering, 32 papers in Surfaces, Coatings and Films and 15 papers in Biomedical Engineering. The topics of these papers are Advancements in Photolithography Techniques (61 papers), Electron and X-Ray Spectroscopy Techniques (25 papers) and Integrated Circuits and Semiconductor Failure Analysis (24 papers). Mark D. Smith is often cited by papers focused on Advancements in Photolithography Techniques (61 papers), Electron and X-Ray Spectroscopy Techniques (25 papers) and Integrated Circuits and Semiconductor Failure Analysis (24 papers) and collaborates with scholars based in United States, Belgium and South Korea. Mark D. Smith's co-authors include John J. Biafore, Chris A. Mack, Stewart A. Robertson, Alessandro Vaglio Pret and Chao Fang and has published in prestigious journals such as Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena and Journal of Micro/Nanolithography MEMS and MOEMS
In The Last Decade
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