Mark Kiehlbauch

15 papers and 412 indexed citations i.

Mark Kiehlbauch has authored 15 papers that have received a total of 412 indexed citations. This includes 14 papers in Electrical and Electronic Engineering, 9 papers in Mechanics of Materials and 2 papers in Materials Chemistry. The topics of these papers are Plasma Diagnostics and Applications (11 papers), Metal and Thin Film Mechanics (9 papers) and Semiconductor materials and devices (8 papers). Mark Kiehlbauch is often cited by papers focused on Plasma Diagnostics and Applications (11 papers), Metal and Thin Film Mechanics (9 papers) and Semiconductor materials and devices (8 papers) and collaborates with scholars based in United States. Mark Kiehlbauch's co-authors include Eray S. Aydil, Sergi Gomez, David B. Graves, D. N. Ruzic and Wenyu Xu and has published in prestigious journals such as Journal of Applied Physics, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films and IEEE Transactions on Semiconductor Manufacturing