Mark L. Schattenburg
About
Mark L. Schattenburg has authored 185 papers that have received a total of 3.7k indexed citations.
This includes 92 papers in Electrical and Electronic Engineering, 64 papers in Surfaces, Coatings and Films and 62 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Optical Coatings and Gratings (58 papers), Advanced X-ray Imaging Techniques (46 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (40 papers). Mark L. Schattenburg is often cited by papers focused on Optical Coatings and Gratings (58 papers), Advanced X-ray Imaging Techniques (46 papers) and Chemical Mechanical Polishing in Microelectronics Manufacturing (40 papers) and collaborates with scholars based in United States, Germany and Japan. Mark L. Schattenburg's co-authors include Ralf K. Heilmann, Henry I. Smith, Chih‐Hao Chang, Paul T. Konkola and Carl G. Chen and has published in prestigious journals such as Physical Review Letters, The Astrophysical Journal and Applied Physics Letters.
In The Last Decade
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