Noriyuki Sakaya

28 papers and 318 indexed citations i.

Noriyuki Sakaya has authored 28 papers that have received a total of 318 indexed citations. This includes 20 papers in Electrical and Electronic Engineering, 14 papers in Surfaces, Coatings and Films and 7 papers in Atomic and Molecular Physics, and Optics. The topics of these papers are Advancements in Photolithography Techniques (19 papers), Electron and X-Ray Spectroscopy Techniques (13 papers) and Integrated Circuits and Semiconductor Failure Analysis (9 papers). Noriyuki Sakaya is often cited by papers focused on Advancements in Photolithography Techniques (19 papers), Electron and X-Ray Spectroscopy Techniques (13 papers) and Integrated Circuits and Semiconductor Failure Analysis (9 papers) and collaborates with scholars based in Japan, Germany and Poland. Noriyuki Sakaya's co-authors include Tsutomu Shoki, Takeo Watanabe, Hiroo Kinoshita, Kazuhiro Hamamoto and Hiroyuki Daido and has published in prestigious journals such as Physical Review A, Japanese Journal of Applied Physics and Journal of the Optical Society of America B