Tsutomu Shoki

53 papers and 384 indexed citations i.

Tsutomu Shoki has authored 53 papers that have received a total of 384 indexed citations. This includes 46 papers in Electrical and Electronic Engineering, 28 papers in Surfaces, Coatings and Films and 10 papers in Mechanical Engineering. The topics of these papers are Advancements in Photolithography Techniques (38 papers), Electron and X-Ray Spectroscopy Techniques (27 papers) and Integrated Circuits and Semiconductor Failure Analysis (18 papers). Tsutomu Shoki is often cited by papers focused on Advancements in Photolithography Techniques (38 papers), Electron and X-Ray Spectroscopy Techniques (27 papers) and Integrated Circuits and Semiconductor Failure Analysis (18 papers) and collaborates with scholars based in Japan, United States and South Korea. Tsutomu Shoki's co-authors include Hiroo Kinoshita, Takeo Watanabe, Noriyuki Sakaya, Kazuhiro Hamamoto and Hiroyuki Nagasawa and has published in prestigious journals such as Japanese Journal of Applied Physics, Sensors and Actuators A Physical and Microelectronic Engineering