P. J. Matsuo

14 papers and 661 indexed citations i.

P. J. Matsuo has authored 14 papers that have received a total of 661 indexed citations. This includes 14 papers in Electrical and Electronic Engineering, 7 papers in Mechanics of Materials and 5 papers in Electronic, Optical and Magnetic Materials. The topics of these papers are Semiconductor materials and devices (12 papers), Plasma Diagnostics and Applications (11 papers) and Metal and Thin Film Mechanics (7 papers). P. J. Matsuo is often cited by papers focused on Semiconductor materials and devices (12 papers), Plasma Diagnostics and Applications (11 papers) and Metal and Thin Film Mechanics (7 papers) and collaborates with scholars based in United States. P. J. Matsuo's co-authors include G. S. Oehrlein, B. E. E. Kastenmeier, T. E. F. M. Standaert, JJ Beulens and Susan D. Allen and has published in prestigious journals such as Applied Physics Letters, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films and IBM Journal of Research and Development