T. Smith
About
T. Smith has authored 10 papers that have received a total of 218 indexed citations.
This includes 5 papers in Biomedical Engineering, 5 papers in Mechanical Engineering and 4 papers in Industrial and Manufacturing Engineering. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers), Advanced Measurement and Metrology Techniques (3 papers) and Industrial Vision Systems and Defect Detection (3 papers). T. Smith is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers), Advanced Measurement and Metrology Techniques (3 papers) and Industrial Vision Systems and Defect Detection (3 papers) and collaborates with scholars based in United States. T. Smith's co-authors include Duane S. Boning, Stephanie Watts Butler, James Moyne, Jerry A. Stefani and John E. Taylor and has published in prestigious journals such as Journal of The Electrochemical Society, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films and IEEE Transactions on Semiconductor Manufacturing
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