Takayuki Uchiyama

41 papers and 443 indexed citations i.

Takayuki Uchiyama has authored 41 papers that have received a total of 443 indexed citations. This includes 34 papers in Electrical and Electronic Engineering, 18 papers in Biomedical Engineering and 6 papers in Surfaces, Coatings and Films. The topics of these papers are Advancements in Photolithography Techniques (19 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (13 papers) and Integrated Circuits and Semiconductor Failure Analysis (9 papers). Takayuki Uchiyama is often cited by papers focused on Advancements in Photolithography Techniques (19 papers), Chemical Mechanical Polishing in Microelectronics Manufacturing (13 papers) and Integrated Circuits and Semiconductor Failure Analysis (9 papers) and collaborates with scholars based in Japan, South Africa and Australia. Takayuki Uchiyama's co-authors include Matsuhiko Nishizawa, Varun Vohra, Isamu Uchida, Takeo Hashimoto and Seiji Nagahara and has published in prestigious journals such as Applied Physics Letters, Langmuir and Journal of The Electrochemical Society