Walter Kleemeier
About
Walter Kleemeier has authored 10 papers that have received a total of 203 indexed citations.
This includes 8 papers in Electrical and Electronic Engineering, 6 papers in Biomedical Engineering and 2 papers in Materials Chemistry. The topics of these papers are Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers), Semiconductor materials and devices (4 papers) and Integrated Circuits and Semiconductor Failure Analysis (3 papers). Walter Kleemeier is often cited by papers focused on Chemical Mechanical Polishing in Microelectronics Manufacturing (4 papers), Semiconductor materials and devices (4 papers) and Integrated Circuits and Semiconductor Failure Analysis (3 papers) and collaborates with scholars based in United States, Switzerland and Germany. Walter Kleemeier's co-authors include Wei‐Tsu Tseng, B. Doris, R. Patlolla, Xiaomeng Chen and C. Surisetty and has published in prestigious journals such as Thin Solid Films, Microelectronic Engineering and ECS Transactions
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